Built-in co-axial illumination
Suitable for various applications, inspection of wafer, IC chip, etc...
|Model||Magnification||WD||Resolution||Object side NA||Depth of field||TV distortion||Maximum
○Indicated specifications are design values. ○Resolution indicates a theoretical resolution at a wavelength of 550nm. ○Depth of field is calculated assuming permissible circle of confusion is 40μm.